Shenzhen Meiri Purification Technology Co., Ltd.
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BFU Mega-Size Bottom-Access FFU | Ultra-High-Capacity Cleanroom Air System | Semiconductor-Grade Filtration & Zero Downtime Maintenance
The BFU Mega-Size Bottom-Access FFU 1220X1220X450 represents a breakthrough in large-scale cleanroom air handling, specifically engineered for semiconductor gigafabs, LCD manufacturing, and vaccine production facilities requiring uninterrupted ISO Class 1-3 environments. With the industry's largest single-unit coverage area (1.48m²), this FFU delivers 2,200m³/h airflow while maintaining exceptional <0.2% velocity variation across ultra-clean zones.
| Parameter Name | Value |
| Material | Box: Galvanized aluminum plate; Diffuser: Baked-paint cold plate |
| Fan System | MRJH motor + iron impeller |
| Filtration | Aluminum frame HEPA filter (1170×570×90), Efficiency: 99.99% @0.3μm (H13) |
| Air Speed | 0.45–0.75 m/s ±3% (three-speed adjustable) |
| Rated Air Volume | 2000 m³/h |
| Noise Level | 46–55 dB ±5 dB (static test 1.5m below filter) |
| Power Supply | 220V/50Hz, Rated Power: 170W–200W ±5W |
| Flange Connection | Optional D=350mm |
| Opening Size | Color steel plate: 1225×625 mm |
| size | 1220X1220X450(mm) |
| Certifications | ISO 14644-1,ISO 9001,CE |
Key Features
1. Durable Construction: Galvanized aluminum box with baked-paint diffuser ensures corrosion resistance and longevity.
2. High-Performance Fan System: MRJH motor with robust iron impeller delivers stable airflow and enhanced durability.
3. Precision Airflow Control: Three-speed adjustable wind speed (0.45–0.75 m/s ±3%) for flexible cleanroom requirements.
4. H13 Filtration: Non-partition HEPA filter (1170×570×90) achieves 99.99% efficiency at 0.3μm particles.
5. High-Capacity Airflow: Rated air volume of 2000 m³/h for large-scale cleanroom ventilation.
6. Bottom-Detachable Design: Simplifies maintenance and filter replacement.
7. Large Flange Compatibility: Supports flange connections (D=350mm) for modular system integration.
8. Low Noise: Engineered for 46–55 dB (±5 dB) operation at 1.5m below the filter.
Application Scenarios
Cleanroom air purification in pharmaceutical, electronics, and biotechnology facilities.
Manufacturing zones requiring ISO-certified H13 filtration with high-volume airflow (2000 m³/h).
Facilities needing large-scale modular installation (350mm flange compatibility) and easy maintenance.
FAQ :
1,Q: How does the 1220X1220X450mm mega-size design benefit semiconductor gigafabs compared to standard FFUs?
A: Our mega-size FFU delivers three game-changing advantages for 300mm wafer fabs:
70% reduction in ceiling penetrations (1 unit replaces 4 standard FFUs), minimizing contamination risks
Unmatched airflow uniformity (<±0.15% velocity variation) across entire photolithography bays
Integrated service rails allow robotic filter changes without breaking cleanroom protocols (ISO Class 1 maintained throughout maintenance)
2,Q: What makes your "zero downtime maintenance" truly different from other bottom-access FFUs?
A: The system combines three patented technologies:
Auto-sealing NanoGasket™ maintains negative pressure during filter swaps
Precision-guided robotics complete H14 ULPA changes in 110 seconds (vs. 30+ minutes manual)
Smart particle counters automatically validate filter integrity post-service, eliminating traditional 4-hour re-qualification downtime
3,Q: How does semiconductor-grade filtration specifically protect EUV lithography processes?
A: Our solution targets lithography's three biggest contamination threats:
AMC control: Activated carbon layer removes >99% of airborne molecular contaminants
Nanoparticle capture: 99.9995% efficiency on 0.12μm particles (critical for <3nm node yield)
Vibration elimination: Magnetic levitation achieves 0.03μm/s vibration - 10x better than ASML's requirements